Miller Profiler

Miller Profiler

Applications

• Bulk, epitaxial and ion implanted wafers –

• Epitaxial and implanted GaAs wafers –

• Process control wafers –

• Special sharp peak structures

Measurement Parameter

• Carrier density vs depth data

System Features

• On-screen real time plot (N vs X) –

• Graphical and columnar data representations –

• Keyboard selectable BIAS and DEPTH modes –

• Menu screen entries for all system parameters –

• Integrated calibration routine –

• Easy-to-use TRAP detection feature

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