Model LEI88

Manual Measurement System

Measurement and Features

• Non-destructive

• Fast, precise measurements of
sheet conductance / sheet resistance

• Nominal sample thickness range of
450 to 800 microns

• Nominal coil gap (>/= 0.35”/0.899 mm)

• Factory-adjustable gap to accommodate
thicker substrates

• Coil size: 0.56” (14mm)

• Max. Wafer size: 6” (150mm)

• HI range: sheet resistance 16 to 3200 ohms/sq.

• Small footprint: 12” x 10” (300mm x 250mm)

• Ideal for Universities and Small Research Institutes

Accessories and Options

• LO range: 0.16 – 16.0 ohms/sq.

• XL range: 0.032 – 1.6 ohms/sq.

• Power Conditioner

• Computer/laptop

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