Model LEI88

Manual Measurement System

  • Measurement and Features
    • Non-destructive
    • Fast, precise measurements of sheet conductance/sheet resistance
    • Nominal sample thickness range of 450 to 800 microns
    • Nominal coil gap (>/= 0.35”/0.899 mm)
    • Factory-adjustable gap to accommodate thicker substrates
    • Coil size: 0.56” (14mm)
    • Max. Wafer size: 6” (150mm)
    • HI range: sheet resistance 16 to 3200 ohms/sq.
    • Small footprint: 12” x 10” (300mm x 250mm)
    • Ideal for Universities and Small Research Institutes
  • Accessories and Options
    • LO range: 0.16 – 16.0 ohms/sq.
    • XL range: 0.032 – 1.6 ohms/sq.
    • Power Conditioner
    • Computer/laptop

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